Al2O3(氧化铝)
Al2O3(氧化铝)
E&MAl2O3
具有低电容结晶特性的优质材料。提供2寸,3寸,4寸Epi-ready片和标准晶向片及客户订制
(off晶向,双面研磨,各种厚度)产品。
【用途】
- 蓝色LED用途(蓝,白,绿,紫LED) GaN结晶生长用基板等
规格
Diameter | 2 inch ~ 4 inch |
Orientation | C(0001)0.2off±0.1°to m-axis |
OF direction | (11-20)±0.3° |
OF length | 2inch:16±0.5mm, 4inch:30±1.0mm |
Thickness | 2inch:430um, 4inch:650um |
Finish | One side epi polished |
Bow | ≦10um (2inch) |
TTV | ≦10um (2inch) |